Sapphire is widely used in many fields from its excellent characteristics, in particular chemical resistance, thermal conductivity, hardness, transparency. Variously-shaped Nano-step structures can be formed on the Sapphire wafer surface, and have been expected to be used as the height standard sample for SPM and Immobilization plate for observing biomaterials.
Relevant Patent Applications: JPA2007-181007 |
· Long Life
· Low Cost (re-cleanable)
· Useful in various measurement environment
(High Temperature Resistance, Chemical Resistance)
· Entire Linear Surface in Wide Area
· Step Height Uniformity (0.22nm±0.01nm)
· Extra Smooth Surface Terraces
· Terrace Width is Controllable (100~200nm)
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Relevant Patent Applications:
JPA006-284316, JPA2007-181007
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Height standard sample for SPM
Immobilization plate for observing biomaterials such as DNA, Protein. |
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